Shokubai CVD <Cat CVD> No Shintenkai Radical Wo Mochiru Shinprocess Gijutsu Fukyu Ban (Electronics Series)
Nakayama Hiroshi / Kanshu
| Points You Earn | 1% (44p) |
|---|---|
| Release Date | November 22, 2013 |
| Availability | Backorder:Usually ships in 1-3 weeks |
Product Details
| Catalog No. | NEOBK-1585597 |
|---|---|
| JAN/ISBN | 9784781307404 |
| Product Type | BOOK |
| Product Package Size (Measured) | 18.5 x 19.2 x 1.2cm |
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| Pages | 276 |
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Books are basically written in Japanese except for bilingual books or ones indicated as not written only in Japanese.
Related Artists
Description in Japanese
触媒CVD〈Cat‐CVD〉の新展開 ラジカルを用いる新プロセス技術 普及版 (エレクトロニクスシリーズ) / 中山弘/監修
Related Offer & Feature
Tracklisting
| 1 |
総論 Cat‐CVD法の誕生、期待とその課題(Cat‐CVD法の誕生
|
| 2 |
Cat‐CVD膜の特徴 ほか)
|
| 3 |
第1章 基礎編(低温成膜の物理とCat‐CVD―フィラメント表面での化学反応の評価
|
| 4 |
気相中のラジカル種の定量 ほか)
|
| 5 |
第2章 Cat‐CVD装置(大型Cat‐CVD装置
|
| 6 |
簡易型Cat‐CVD装置 ほか)
|
| 7 |
第3章 応用編(SiN―LSIトランジスターへの応用
|
| 8 |
レジストエッチング―水素ラジカルによるレジスト除去 ほか)
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| 9 |
第4章 材料各論(アモルファスおよび微結晶Si
|
| 10 |
エピタキシャルSiC ほか)
|
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